Friday, May 02, 2014 from 04:00 PM to 05:00 PM
Prof. Raj N. Singh from Oklahoma State University - Tulsa will talk about his research on diamond thin films.
Properties and Processing of
Diamond Thin Films for Electronics
Prof. Raj N. Singh
School of Materials Science and Engineering
Oklahoma State University -- Tulsa
Friday, May 2, 2014
4:00pm - 5:00pm
Keplinger Hall M216
Polycrystallinediamond (PCD) thin films have unique properties for applications in Si-, SiC-, and GaN-based electronics because of its wide bandgap, transparency, high thermal conductivity, and large carrier mobility. In particular, diamond has very useful electrical properties and the highest thermal conductivity of any materials and quite attractive for applications in electronics for heat conduction or removal from active areas so that the circuits can be operated at higher power and higher efficiencies. The primary objective of this research is to develop low-temperature (300-600°C) processing techniques for the synthesis of undoped and doped nanocrystalline and PCD films with good electrical properties and thermal conductivity suitable for applications in electronic devices. The diamond film growth is done by a modification of the microwave plasma enhanced chemical vapor deposition (MPCVD) method on Si (100) and SiC substrates using methane in a hydrogen or argon plasma environment. The influence of various process parameters such as plasma gas composition, substrate temperature, pressure, and microwave power on the composition, crystal quality, and electrical and thermal conductivity of the PCD films are studied. A laser based approach is developed to measure thermal conductivity ofthe diamond films. Issues of interface thermal resistance are studied using both the analytical modeling and experimental approaches. These results on processing, electrical properties, and thermal conductivity will be presented.